THICKNESS-DEPENDENCE OF RESIDUAL STRESS IN LEAD-FREE FERROELECTRIC K0.5Na0.5NbO3 FILMS
作者： LINGYAN WANG , WEI REN , PHOI CHIN GOH , KUI YAO , PENG SHI
DOI: 10.1142/S2010135X1250021X
关键词:
摘要: Lead-free ferroelectric K0.5Na0.5NbO3 (KNN) films with different thicknesses were prepared by polyvinlypyrrolidone (PVP)-modified chemical solution deposition (CSD) method. Their residual stresses studied two methods of X-ray diffraction (XRD) and nanoindentation fracture. It was found that the tensile stress occurs in KNN small thickness 1.3 μm after all kinds neutralized, which is mainly originated from interaction across grain boundaries. With increasing to 2.5 above it, changed compressive stresses, decreased increased. These results could explain why a thicker film can show improved electrical properties larger thickness, better piezoelectric properties.
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