Electroosmotic Pumps Fabricated From Porous
作者： Jonathan D. Posner , Shuhuai Yao , Alan M. Myers , Klint A. Rose , Juan G. Santiago
DOI:
关键词:
摘要: N-type porous silicon can be used to realize electroos- motic pumps with high flow rates per applied potential difference. The porosity and pore size of membranes tuned, the geometry has near-unity tortuosity, mem- branes made thin integrated support structures. hexagonally packed pores is modified by low-pressure chemical vapor deposition (LPCVD) polysilicon deposition, fol- lowed wet oxidation layer, resulting in a radius varying from 1 3 m. Pumping performance these devices experimentally studied as function compared theory. These 350- m-thick ex- hibit maximum rate field 0.13 ml/min/cm /V. This figure merit five times larger than previously demon- strated glass EO pumps. (1494)
stanford.edu 参考文章(27)
Rafael C. Gonzales, Paul Wintz, Digital image processing (2nd ed.) Addison-Wesley Longman Publishing Co., Inc.. ,(1987)
H. Presting, J. Konle, V. Starkov, A. Vyatkin, U. König, Porous silicon for micro-sized fuel cell reformer units Materials Science and Engineering B-advanced Functional Solid-state Materials. ,vol. 108, pp. 162- 165 ,(2004) , 10.1016/J.MSEB.2003.10.115
Shuhuai Yao, Alan M. Myers, Jonathan D. Posner, Juan G. Santiago, Electroosmotic Pumps Fabricated From Porous Silicon Membranes Fluids Engineering. pp. 185- 190 ,(2004) , 10.1115/IMECE2004-61350
Wu-er Gan, Li Yang, You-zhao He, Rong-hui Zeng, M Luisa Cervera, Miguel de la Guardia, Mechanism of porous core electroosmotic pump flow injection system and its application to determination of chromium(VI) in waste-water Talanta. ,vol. 51, pp. 667- 675 ,(2000) , 10.1016/S0039-9140(99)00320-3
D.Jed Harrison, P.G. Glavina, Andreas Manz, Towards miniaturized electrophoresis and chemical analysis systems on silicon: an alternative to chemical sensors☆ Sensors and Actuators B-chemical. ,vol. 10, pp. 107- 116 ,(1993) , 10.1016/0925-4005(93)80033-8
Shulin Zeng, Chuan-Hua Chen, James C. Mikkelsen, Juan G. Santiago, Fabrication and characterization of electroosmotic micropumps Sensors and Actuators B-chemical. ,vol. 79, pp. 107- 114 ,(2001) , 10.1016/S0925-4005(01)00855-3
Timothy E. McKnight, Christopher T. Culbertson, Stephen C. Jacobson, J. Michael Ramsey, Electroosmotically Induced Hydraulic Pumping with Integrated Electrodes on Microfluidic Devices Analytical Chemistry. ,vol. 73, pp. 4045- 4049 ,(2001) , 10.1021/AC010048A
Yuzuru Takamura, Hiroyuki Onoda, Hiromichi Inokuchi, Sakuichiro Adachi, Akio Oki, Yasuhiro Horiike, Low-voltage electroosmosis pump for stand-alone microfluidics devices ELECTROPHORESIS. ,vol. 24, pp. 185- 192 ,(2003) , 10.1002/ELPS.200390012
S. Yao, A.M. Myers, J.D. Posner, K.A. Rose, J.G. Santiago, Electroosmotic pumps fabricated from porous silicon membranes IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 15, pp. 717- 728 ,(2006) , 10.1109/JMEMS.2006.876796
L. T. Canham, Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers Applied Physics Letters. ,vol. 57, pp. 1046- 1048 ,(1990) , 10.1063/1.103561