A disposable ozone sensor based on a grating-coupled glass waveguide coated with a tapered film of copper tetra-t-butylphthalocyanine

摘要: Abstract An integrated optical sensor specifically sensitive to ozone has been developed by vacuum evaporating a tapered thin film of copper tetra-t-butylphthalocyanine (CuPct) through mask onto slab waveguide made K+–Na+ ion-exchange in glass. A pair photoresist gratings fabricated on the offer good long-term stability coupling. The evaporated dye composed CuPct H-aggregates large absorption at 633 nm and high-index refraction relative that glass substrates. Therefore, waveguiding mode excited with laser beam film-coved is highly attenuated. very stable air but exposure room temperature can result rapid irreversible decoloration film. In presence given concentration ambient about senor, output light intensity was detected linearly increase time. It demonstrated containing 15 mm long tens-of-nanometers thick detect 33 ppb temperature.