Techniques for providing a ribbon-shaped gas cluster ion beam
作者： Joseph C. Olson , Anthony Renau , Jonathan Gerald England
DOI:
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摘要: Techniques for providing a ribbon-shaped gas cluster ion beam are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus beam. The comprise at least nozzle configured to inject source sufficient speed into low-pressure vacuum space form clusters. also ionizer that causes portion of clusters ionized. further beam-shaping mechanism forms based on ionized
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