Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model

摘要: This paper proposes a simple collisional-radiative model to characterise capacitively coupled argon plasmas driven by conventional radio frequency in combination with optical emission spectroscopy and Langmuir probe measurements. Two major processes are considered this model, electron-impact excitation the spontaneous radiative decay. The diffusion loss term, which is found be important for two metastable states (4s[3/2]2, 4s'[1/2]0), also taken into account. Behaviours of representative discussed. lines (located at 696.5 nm 750.4 nm) selected intensities measured obtain populated densities corresponding plasma. calculated results agree well that probe, indicating current combined candidate tool electron density temperature measurement discharges.