Subsurface compositional modification of Au-Cu alloys sputtered with Ar, Xe, Ne and Kr ions
作者： T. Koshikawa
DOI: 10.1016/0378-5963(85)90043-1
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摘要: Abstract Surface and subsurface compositional changes in Au-Cu alloys thin films sputtered with 2 keV Ar, Xe, Ne Kr ions were observed low energy (60 eV for Cu 69 Au) high (239 Au 920 Cu) Auger peaks at temperatures between liquid nitrogen room temperature. For a 0.56 0.44 alloy, enrichment the surface depletion beneath was as well peaks. But change assessed is greater than that This also calculated simulation of sputtering including ion radiation-enhanced segregation diffusion. shows clearly Gibbsian plays an important role composition ion-sputtered alloy. Compositional film prepared by co-evaporation technique following Kr. Except case coevaporated preserved during (
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