COAXIAL OPTICAL SYSTEM OF A FRICTIONLESS SCAN SYSTEM FOR LIGHT DETECTION AND RANGING, LIDAR, MEASUREMENTS

作者: Müller Mathias , Schardt Michael

DOI:

关键词:

摘要: A scan system (100) includes a steering mirror (150) having reflective surface (151) and an elastic mount (902) of the (150). An actuator (901) is configured to actuate, by deformation (902), resonant motion mass- spring formed (902). laser (101) emit primary light (111) along transmit beam (121). detector (102) detect secondary (112) receive (122), (121) (122) being aligned overlap section (125) comprising coaxial optical may thereby be implemented. LIDAR applications are possible.

参考文章(17)
Peter Schmollngruber, Hans Artmann, Thomas Wagner, Micromechanical component and method for producing a micromechanical component ,(2008)
Hendrikus Wilhelmus Leonardus Antonius Maria Van Lierop, Marijn Johannes Van Os, Matthijs Alexander Gerard Suijlen, Mems scanning micromirror ,(2012)
Yoshiaki Hoashi, Optical radar device ,(2013)
David S. Hall, High definition lidar system ,(2007)
Thilo Sandner, Thomas Grasshoff, Michael Wildenhain, Harald Schenk, Synchronized microscanner array for large aperture receiver optics of LIDAR systems Proceedings of SPIE, the International Society for Optical Engineering. ,vol. 7594, ,(2010) , 10.1117/12.844923
Thilo Sandner, Claudia Baulig, Thomas Grasshoff, Michael Wildenhain, Markus Schwarzenberg, Hans-Georg Dahlmann, Stefan Schwarzer, Hybrid assembled micro scanner array with large aperture and their system integration for a 3D ToF laser camera Proceedings of SPIE. ,vol. 9375, pp. 937505- ,(2015) , 10.1117/12.2076440
Katsumi Kimoto, Norihiro Asada, Toshihiro Mori, Yoshitaka Hara, Akihisa Ohya, Shin'ichi Yuta, Development of small size 3D LIDAR international conference on robotics and automation. pp. 4620- 4626 ,(2014) , 10.1109/ICRA.2014.6907534
Ulrich Hofmann, Mika Aikio, Joachim Janes, Frank Senger, Vanessa Stenchly, Juergen Hagge, Hans-Joachim Quenzer, Manfred Weiss, Thomas von Wantoch, Christian Mallas, Bernhard Wagner, Wolfgang Benecke, Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning Journal of Micro-nanolithography Mems and Moems. ,vol. 13, pp. 011103- 011103 ,(2013) , 10.1117/1.JMM.13.1.011103
Hendrikus W.L.A.M. van Lierop, Krassimir T. Krastev, Hermanus M.J.R. Soemers, Renatus H.M. Sanders, MEMS scanning micromirror with reduced dynamic deformation ,(2008)