Damage of functionalized self-assembly monomolecular layers applied to silicon microgear MEMS
作者： Nabeel Almuramady , Feodor M. Borodich , Irina G. Goryacheva , Elena V. Torskaya
DOI: 10.1016/J.TRIBOINT.2018.07.049
关键词:
摘要: Abstract Tooth surfaces of silicon-based MEMS microgears are described as smooth covered by adhesive asperities (nanoblocks). To reduce effects, the tooth functionalized OTS-SAM (Octadecyltrichlorosilane self-assembly monomolecular) carbon-based coatings. The wear coating is modelled using modified Goryacheva-Torskaya model damage accumulation. amount energy dissipated different physical and chemical mechanisms along with mechanical deformation counterparts used to evaluate frictional force. main scenarios process within discussed. evolution for several levels external load.
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