Ion Motion in Dielectric Gases

摘要: Dielectric gases are used in a wide variety of important applications such as gas insulation and semiconductor fabrication (Christophorou 2000). As their use is abatement (Kiehlbauch 2001), since like SF6 or some perfluorocarbons potent greenhouse gases. The above processes require that at stage the be subjected to discharge conditions, which nowadays optimized by previous modeling process simulation, turn demand knowledge cross sections and/or swarm transport data for numerous physico-chemical occuring discharge. It well known extent present quantitative on electron-molecule (atom) interactions with dielectric gases, electron scattering, impact ionization dissociation, transport, far overwhelms ion-molecule interactions, form elastic inelastic momentum transfer reaction sections, coefficients mobility, diffusion rates, name only most relevant quantities. There exist many cases literature where researcher faces problem having meagre, even lacking, ion section provide explanation phenomenon under study simulation.