Silicon photodetector structure for direct coupling of optical fibers to integrated circuits

摘要: A novel detector structure exhibiting real-estate efficient coupling of optical fibers to semiconductor devices is described. The integrated fiber-optic coupler employs vertical insertion a tapered single-mode fiber into laser-etched cylindrical hole in the substrate. It features small surface footprint, mechanical stability, and accurate alignment. Fabricated silicon, p-n junction detectors have typically shown responsivities 0.23 A/W at 0.63 µm, corresponding quantum efficiency 45 percent, dark currents below 1 nA.