Method of forming a three dimensional integrated circuit structure

作者: Lee R. Reid

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摘要: A semiconductor circuit apparatus including several substrates interconnected by having elevated portions of one substrate contacting the surface second where both include at least electrical circuit. Also included is a method for forming this three dimensional integrated structure applying an orientation-dependent etch and then electrically conductive coating to portion. Electrically bonding pads are formed on substrate. These selectively positioned relative first Contacts between bonds