Aging of silicon-based dielectric coatings deposited by plasma polymerization
作者： Jan Studynka , Vladimir Cech
DOI: 10.1016/J.TSF.2010.11.025
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摘要: … coatings were deposited from tetravinylsilane or a mixture of tetravinylsilane with oxygen gas … The SiH, SiC, and CH x species in the plasma polymer film were identified as responsible …
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