Ultraviolet-Ozone Treatment for Effectively Removing Adhesive Residue on Graphene

作者: Hang Yang , ShiQiao Qin , Gang Peng , Xiaoming Zheng , Xueao Zhang

DOI: 10.1142/S1793292016501411

关键词:

摘要: In this paper, we systematically investigated the influence of adhesive residue existing in deterministic transfer process upon graphene, and put forward a rapid effective way named ultraviolet-ozone (UVO) treatment to reduce negative effect. Results indicate that may cause poor contact between metal thus greatly degrading performance device. However, unpleasant could be reduced effectively by adopting UVO treatment. This work helpful fabricate higher functional devices based on two-dimensional materials removal residue.

参考文章(34)
Peng Li, Zheng You, Greg Haugstad, Tianhong Cui, Graphene fixed-end beam arrays based on mechanical exfoliation Applied Physics Letters. ,vol. 98, pp. 253105- ,(2011) , 10.1063/1.3594242
L. Wang, I. Meric, P. Y. Huang, Q. Gao, Y. Gao, H. Tran, T. Taniguchi, K. Watanabe, L. M. Campos, D. A. Muller, J. Guo, P. Kim, J. Hone, K. L. Shepard, C. R. Dean, One-dimensional electrical contact to a two-dimensional material. Science. ,vol. 342, pp. 614- 617 ,(2013) , 10.1126/SCIENCE.1244358
B. Radisavljevic, A. Radenovic, J. Brivio, V. Giacometti, A. Kis, Single-layer MoS2 transistors Nature Nanotechnology. ,vol. 6, pp. 147- 150 ,(2011) , 10.1038/NNANO.2010.279
Yana Mulyana, Masahiro Horita, Yasuaki Ishikawa, Yukiharu Uraoka, Shinji Koh, Thermal reversibility in electrical characteristics of ultraviolet/ozone-treated graphene Applied Physics Letters. ,vol. 103, pp. 063107- ,(2013) , 10.1063/1.4818329
Andrea C. Ferrari, Francesco Bonaccorso, Vladimir Fal'ko, Konstantin S. Novoselov, Stephan Roche, Peter Bøggild, Stefano Borini, Frank H. L. Koppens, Vincenzo Palermo, Nicola Pugno, José A. Garrido, Roman Sordan, Alberto Bianco, Laura Ballerini, Maurizio Prato, Elefterios Lidorikis, Jani Kivioja, Claudio Marinelli, Tapani Ryhänen, Alberto Morpurgo, Jonathan N. Coleman, Valeria Nicolosi, Luigi Colombo, Albert Fert, Mar Garcia-Hernandez, Adrian Bachtold, Grégory F. Schneider, Francisco Guinea, Cees Dekker, Matteo Barbone, Zhipei Sun, Costas Galiotis, Alexander N. Grigorenko, Gerasimos Konstantatos, Andras Kis, Mikhail Katsnelson, Lieven Vandersypen, Annick Loiseau, Vittorio Morandi, Daniel Neumaier, Emanuele Treossi, Vittorio Pellegrini, Marco Polini, Alessandro Tredicucci, Gareth M. Williams, Byung Hee Hong, Jong-Hyun Ahn, Jong Min Kim, Herbert Zirath, Bart J. van Wees, Herre van der Zant, Luigi Occhipinti, Andrea Di Matteo, Ian A. Kinloch, Thomas Seyller, Etienne Quesnel, Xinliang Feng, Ken Teo, Nalin Rupesinghe, Pertti Hakonen, Simon R. T. Neil, Quentin Tannock, Tomas Löfwander, Jari Kinaret, Science and technology roadmap for graphene, related two-dimensional crystals, and hybrid systems Nanoscale. ,vol. 7, pp. 4598- 4810 ,(2015) , 10.1039/C4NR01600A
Ming Liu, Xiaobo Yin, Erick Ulin-Avila, Baisong Geng, Thomas Zentgraf, Long Ju, Feng Wang, Xiang Zhang, A graphene-based broadband optical modulator Nature. ,vol. 474, pp. 64- 67 ,(2011) , 10.1038/NATURE10067
T. Georgiou, M. I. Katsnelson, L. Eaves, S. V. Morozov, N. M. R. Peres, J. Leist, A. K. Geim, K. S. Novoselov, L. A. Ponomarenko, L. Britnell, R. V. Gorbachev, R. Jalil, B. D. Belle, F. Schedin, A. Mishchenko, Field-effect tunneling transistor based on vertical graphene heterostructures. Science. ,vol. 335, pp. 947- 950 ,(2012) , 10.1126/SCIENCE.1218461
Chung Wei Chen, Fan Ren, Gou-Chung Chi, Sheng-Chun Hung, Y. P. Huang, Jihyun Kim, Ivan I. Kravchenko, Stephen J. Pearton, UV ozone treatment for improving contact resistance on graphene Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. ,vol. 30, pp. 060604- ,(2012) , 10.1116/1.4754566
Mark P. Levendorf, Cheol-Joo Kim, Lola Brown, Pinshane Y. Huang, Robin W. Havener, David A. Muller, Jiwoong Park, Graphene and boron nitride lateral heterostructures for atomically thin circuitry Nature. ,vol. 488, pp. 627- 632 ,(2012) , 10.1038/NATURE11408
N. Tombros, M. H. D. Guimarães, J. C. Brant, P. J. Zomer, B. J. van Wees, Fast pick up technique for high quality heterostructures of bilayer graphene and hexagonal boron nitride Applied Physics Letters. ,vol. 105, pp. 013101- ,(2014) , 10.1063/1.4886096