Preparation, Crystal Structure, and Photocatalytic Activity of TiO2 Films by Chemical Vapor Deposition

作者: Sang-Chul Jung , Nobuyuki Imaishi

DOI: 10.1007/BF02705610

关键词:

摘要: Photocatalytic activities of TiO2 films were experimentally studied. with different crystal structures (amorphous, anatase, rutile) prepared by a Low Pressure Metal Organic Chemical Vapor Deposition (LPMOCVD) at reaction temperatures and also Sol-Gel method using TTIP (Titanium Tetra Iso-Pro-poxyde). The Effect CVD preparation method, conditions, structure wave-length UV light on the photocatalytic decomposition rate methylene blue in aqueous solution First, characteristics films, such as film growth rate, morphology grown studied function temperature. Secondly, evaluated two types photo-reactors. results indicated that exhibit higher activity than catalyst method. Among anatase rutile showed high activities. However, amorphous lower photocatalysts was excellent under all UV-lamps. CVD-prepared four to seven times photocatalyst

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