Transmission type silicon-nano-array light beam splitter

摘要: The utility model, which belongs to the field of micro-nano optics, discloses a transmission type silicon-nano-array light beam splitter comprising crystalline silica substrate and plurality silicon nanometer rod arrays that are etched at distributed periodically. Each array periodically contains cuboid rods uniformly oriented different directions. has following advantages: as long all-silicon rotates certain direction working face, phase modulation in range 0 360 degrees can be realized thus equivalent any face device; only traditional two-step embossing DOE process step is needed. Moreover, tolerance error exceeds DOE. film plating device reduced stability reliability further improved.