Modular gas box system

摘要: A modular gas box system comprises a series of modules that each connect into upper and lower manifolds distribute reactive purge gases through weldments monoblock valves. motherboard distributes power, control signals, pneumatics air to all the plug-in modules. Environmental provide vent lines process' reaction chambers. An embedded microcomputer manages in situ safety diagnostics for every module has been assigned address. Each 24 is easy remove replace integrates distribution, analog-to-digital converters, device controllers support electronics. Gas 24s include digital mass flow controllers, analog pressure switches transducers, filters pneumatic