Pressure sensor capsule
作者： Mark G. Romo
DOI:
关键词:
摘要: A pressure sensing capsule includes a sensor inside wall. The wall feedthrough opening. is mounted to stress isolation member with hole. the hole overlying electrical contacts on sensor.
lens.org 参考文章(11)
Thomas A. Knecht, Mark G. Romo, Silicon side by side coplanar pressure sensors ,(1987)
Jürg Stahl, Stephan Trautweiler, Microsensors with silicon membranes and method of manufacturing such sensors ,(1996)
Fred C. Sittler, Transmitter with isolation assembly for pressure sensor ,(1997)
Charles H. Umeda, Armand Issaian, Harold Beekhuizen, Simplified capacitance pressure sensor ,(2001)
Russell Bolin Hopkins, Lewis Henry Little, John Michael Matley, Pressure sensor having reduced hysteresis and enhanced electrical performance at low pressures ,(1996)
Fred C. Sittler, David A. Broden, James L. Gravel, Sensor with fluid isolation barrier ,(2001)
Reto Calderara, Hans-Conrad Sonderegger, Rene Tanner, Alfred Wenger, Pressure transducer utilizing a transduction element ,(1984)
René Tanner, Stefan Vanyo, Alfred Dr. Phys. Wenger, Measurement cell, particularly for measurements of relative and differential pressure ,(1987)
Thomas A. Knecht, Mark G. Romo, Media isolated differential pressure sensors ,(1987)
D. Joseph Maurer, Pressure sensor with improved heat dissipation characteristics ,(1993)