Ultrafast laser micro-cutting of stainless steel and PZT using a modulated line of multiple foci formed by spatial beam shaping

摘要: Abstract Femtosecond laser surface processing of materials allows for precise micrometer cutting with restricted detrimental side effects. An efficient way to increase the ablation or speed and energy efficiency process is generation N parallel spots in focal plane a lens on sample surface, each spot simultaneously following defined trajectory. However, scheme then limited area avoid overlap trajectories. We present this paper technique overcome limitation. The ultrafast beam wavefront spatially modulated, generating line multiple plane. Micro-cutting conducted by translation along line. That way, no restriction trajectory length imposed while preserving compared single machining. Successful PZT ceramic stainless steel achieved array machining terms time. In case PZT, various lenses. also investigate effect intensity gradient micro-cutting steel. method discussed relying characterization using scanning electron microscopy.