Programmable mask and method of fabricating biomolecule array using the same
作者： Chang Auck Choi , Hyeon Bong Pyo , Moon Youn Jung , Se Ho Park , Dong Ho Shin
DOI:
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摘要: The present invention relates to a programmable mask used in photolithography process for fabricating biomolecule array and method of using the same and, more particularly, which can increase contrast ratio transmittance versus shielding light incident liquid crystal constitutes each pixel by irradiating parallel ultraviolet (“UV”) generated from an external exposure device certain cell vertically aligned panel or LC having no spacer, same.
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