Fabrication of polymer micro/nano-hybrid lens array by microstructured anodic aluminum oxide (AAO) mold
作者： Bong-Kee Lee , Kyung Je Cha , Tai Hun Kwon
DOI: 10.1016/J.MEE.2008.11.066
关键词:
摘要: In the present study, polymer micro/nano-hybrid lens array is fabricated by hot embossing process using a microstructured anodic aluminum oxide (AAO) mold. For mass replication of functional microoptical elements such as antireflective microlens array, novel fabrication method multiscale mold proposed and demonstrated. The consists two consecutive steps - an indentation electropolished substrate for microstructures electrochemical oxidation nanostructures on top microstructures. By method, AAO successfully realized utilized in process. this manner, PMMA covered with close-packed nanolens fabricated.
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elsevier.com参考文章(8)
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