Efficient design and optimization of MEMS by integrating commercial simulation tools

摘要: This article presents a simulation tool for developing and characterizing microelectromechanical systems (MEMS). The advantage of the demonstrated modular concept is due to flexibility program structure reduction costly software support by integrating commercial simulators. A novel application manager controls different subprograms specific drivers ensures data management parametric studies. So complex system behaviour interactions MEMS components can be analysed optimated during design process, resulting in shorter manufacturing cycles.