Interferometric characterization of phase masks.
作者： Mikhail Sumetsky , Yury Dulashko , Tom P. White , Tim Olsen , Paul S. Westbrook
DOI: 10.1364/AO.42.002336
关键词:
摘要: We demonstrate a novel interferometric technique for highly accurate characterization of phase masks used in optical fiber grating fabrication. The principle the measurement scheme is based on analysis interference pattern formed between first- and zero-order beams transmitted through or reflected from under test. For spatial resolution few millimeters, our methods allow determination local variations order 1-µm period with an accuracy picometers. These are applicable to broad class diffractive structures.
harvard.edu
osapublishing.org参考文章(5)
Katherine Creath, V Phase-Measurement Interferometry Techniques Progress in Optics. ,vol. 26, pp. 349- 393 ,(1988) , 10.1016/S0079-6638(08)70178-1
F Barnier, P.E Dyer, H.V Snelling, R.M De la Rue, Sub-nanometer metrology of chirped phase masks by optical Moiré Optics Communications. ,vol. 170, pp. 175- 179 ,(1999) , 10.1016/S0030-4018(99)00461-7
Fouad El-Diasty, Alan Heaney, Turan Erdogan, Analysis of fiber bragg gratings by a side-diffraction interference technique. Applied Optics. ,vol. 40, pp. 890- 896 ,(2001) , 10.1364/AO.40.000890
Michael Sumetsky, Benjamin Eggleton, C. de Sterke, Theory of group delay ripple generated by chirped fiber gratings Optics Express. ,vol. 10, pp. 332- 340 ,(2002) , 10.1364/OE.10.000332
B.J. Eggleton, A. Ahuja, P.S. Westbrook, J.A. Rogers, P. Kuo, T.N. Nielsen, B. Mikkelsen, Integrated tunable fiber gratings for dispersion management in high-bit rate systems Journal of Lightwave Technology. ,vol. 18, pp. 1418- 1432 ,(2000) , 10.1109/50.887194