Micromachined Particles for Detecting Metal-Ion Concentration in Fluids

作者: R. Supino , J.J. Talghader

DOI: 10.1109/JMEMS.2006.880246

关键词:

摘要: A remote microfluidic metal-ion sensor is developed using an electrochemical system integrated with a compact photovoltaic cell power supply. The designed to detect the sum of metal ions in environment. uses electrodeposition remove from fluid around and deposit them on electrode at tip cantilever. electrodeposited mass changes resonant frequency cantilever, which can be determined upon read-out. dropped liquids or flow through systems used parallel many other similar sensors. cells are directly device capable producing tens microwatts about 15% efficiency laser excitation. However, operates levels 50 nW small voltages currents only scavenged daylight room light. complete into total volume below 0.046 mm3, more than two orders magnitude smaller electrically-powered sensors reported date. Although it expected that multiple devices will gain statistical data, individual particles concentration within 24% actual concentration, making suitable for safety testing endpoint monitoring among applications

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