Epitaxial lift off stack having a pre-curved handle and methods thereof

摘要: Embodiments of the invention generally relate to epitaxial lift off (ELO) thin films and devices methods used form such devices. In one embodiment, a method for forming an ELO film is provided which includes depositing material over sacrificial layer on substrate, adhering flattened, pre-curved support handle onto material, removing during etching process. The process bending have substantial curvature while peeling from substrate etch crevice therebetween. Compression maintained within may be formed by flattening material.