MEMS optical microphone with electrostatically controlled grating diaphragm
作者： Kazuhiro Suzuki , Hideyuki Funaki , Yujiro Naruse
DOI: 10.1088/0957-0233/17/4/028
关键词:
摘要: A new optical microphone was developed based on complementary metal–oxide–semiconductor (CMOS)—microelectromechanical systems (MEMS) micromachining techniques. One of the outstanding features this is that output signal obtained as a vibration diffraction pattern from grating diaphragm which electrostatically actuated. The electronic actuates at an arbitrary frequency by electrostatic force and simultaneously detects sound using light waves. From verification experiment, able to perform advanced functions, such selection detection wave phase information. Based theoretical model, experimental data are discussed potential applications also proposed.
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