TrueEBSD: Correcting spatial distortions in electron backscatter diffraction maps.

作者: Vivian S. Tong , T. Ben Britton

DOI: 10.1016/J.ULTRAMIC.2020.113130

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摘要: Abstract Electron backscatter diffraction (EBSD) in the scanning electron microscope is routinely used for microstructural characterisation of polycrystalline materials. Maps EBSD data are typically acquired at high stage tilt and slow scan speed, leading to drift distortions that obscure or distort features final microstructure map. In this paper, we describe TrueEBSD, an automatic postprocessing procedure distortion correction with pixel-scale precision. Intermediate images separate components fit each a physically-informed model. We demonstrate TrueEBSD on three case studies (titanium, zirconium hydride containing Zr), where removal has enabled otherwise inaccessible features.

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