Soft X-Ray Contact Imaging of Thin Films by a Laser-Plasma Source
作者： S. Stagira , F. Calegari , E. Benedetti , J. Cabanillas , M. Nisoli
DOI: 10.1109/CLEO.2007.4453104
关键词:
摘要: Quantitative analysis of nanometric films is achieved by soft X-ray imaging using a laser-plasma source and LiF crystals as detectors. Excitation color center fluorescence in exposed allows image detection with sub-micron resolution.
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