DEVELOPMENT MONITORING DEVICE
作者： Tomizawa Yukio
DOI:
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摘要: PURPOSE:To monitor a diffracted light signal ratio when exposure in radius direction changes by providing means to perform laser beam scan on the pattern plane of rotating optical master disk direction, 0th-order and 1st-order detectors, mobile stage, an amplifier, arithmetic part. CONSTITUTION:A polygonal mirror 20 is irradiated (a), beams (a1 an) are generated at ftheta lens 22 lengthy 23, 1. The detectors 5 6 moved synchronizing with scanning 4 stage 8, 1st- order diffracred (b) (c) detected, respectively. Detecting voltages (d) (e) amplified, respectively, diffraction strength signals (f) (g) inputted part 11. (h) computed outputted from (g). change monitored, drop developer shifted outer periphery inner larger than that periphery, thereby, progression development can be suppressed. By performing such monitoring, it possible form uniform group grooves peripheries pattern.
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