System for preventing improper insertion of FOUP door into FOUP
作者： Gary M. Gallagher , Michael Ng , Anthony C. Bonora
DOI:
关键词:
摘要: An apparatus for preventing improper engagement of a pod door and pod. Specifically, misalignment at least one latch finger connected to the with slots in prevents from mechanically engaging
lens.org 参考文章(15)
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