Plasma assisted deposition of nanocrystalline BCN thin films and property characterization
作者： Z. X. Cao , L. M. Liu , H. Oechsner
DOI: 10.1116/1.1518973
关键词:
摘要: … plasma assisted CVD method.… BCN thin films were grown using the ECWR plasma assisted deposition method. In the applied energy window, the films prepared with nitrogen plasma …
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