Development of a new combinatorial mask for addressable ternary phase diagramming: application to rare earth doped phosphors
作者： R. Takahashi , H. Kubota , T. Tanigawa , M. Murakami , Y. Yamamoto
DOI: 10.1016/S0169-4332(03)00925-5
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摘要: Abstract We report on the computer-aided design of a novel mask for addressable ternary phase diagram to serve quick screening multi-component functional materials. Masking patterns were optimized make triangular with each composition changed from 0 100% by simulating deposition process under condition synchronous control motion, target exchange, and laser pulses. Fabrication M0.01Y1.99O3 (M=Eu, Tm, Tb) phosphor material demonstrates direct mapping relationship between film its cathode luminescence (CL) property.
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