Trench mosfet with integrated schottky barrier diode

作者: Daniel Calafut , Hamza Yilmaz , Jongoh Kim , Yi Su , Hong Chang

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摘要: A Schottky diode includes a semiconductor layer formed on substrate; first and second trenches in the where are lined with thin dielectric being filled partially trench conductor remaining portions of layer; metal top surface between trench. The is as anode cathode. each electrically connected to diode. In one embodiment, integrated field effect transistor same substrate.

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