Plasma treatment system
作者： Koichiro Watanabe , Manabu Ishikawa , Shuichi Kimura
DOI:
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摘要: In a plasma treatment system, temperature detection section detecting of perfusion layer an electrically conductive solution is fixed to portion, and located at position be immersed in the when first electrode portion second are layer. control controls adjustment unit supply volume suction on basis result so that within target range.
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