Nanometer‐scale modification of tribomechanical properties of Si(111):H surfaces performed and investigated by a conducting‐probe scanning force microscope

摘要: Hydrogen‐terminated Si(111) surfaces were patterned on the nanometer scale by field‐induced oxidation with a conducting‐probe scanning force microscope. The same microscope tip was then used to measure resulting sample topography and its local tribomechanical properties. formation of oxide patterns homogeneous height up several nanometers is accompanied relative increase friction ∼30% over layers which scales linearly height. Force modulation microscopy in resonance mode provides material contrast between layer surrounding substrate.