δ-Bi2O3 thin films prepared by reactive sputtering:Fabrication and characterization
作者： HT Fan , SS Pan , XM Teng , C Ye , GH Li
DOI: 10.1016/J.TSF.2006.01.074
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摘要: Nanocrystalline δ-Bi 2 O 3 thin films have been successfully prepared by radiofrequency reactive magnetron sputtering on Si(100) substrate using pure Bi as target. The influences of …
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