Micromachined rotating integrated switch
作者： Allyson D. Yarbrough
DOI:
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摘要: A microelectromechanical system (MEMS) switch has a bidirectionally rotating member having two positions for integrated circuit connection. The is formed on circular standoff bearing the in plane of substrate using conventional processing techniques. Control traces carry electrical signals generating fields to provide an electro-static force upon rotate clockwise or counter-clockwise position and maintain it either positions. MEMS wide applications variety applications.
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