Analysis of Linearity Deterioration in Multidevice RF MEMS Circuits
作者： Umer Shah , Mikael Sterner , Joachim Oberhammer
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摘要: This paper presents for the first time an RF nonlinearity analysis of complex multidevice radio frequency microelectromechanical system (RF MEMS) circuits. The IIP3 different MEMS tunable-circuit concepts including digital varactor banks, switched capacitor distributed phase shifters, and tunable filters, is investigated. Closed-form analytical formulas circuit are derived. A analysis, based on measured device parameters, presented exemplary circuits using a nonlinear electromechanical model implemented in Agilent Advanced Design System. results also compared with calculated derived equations bank bank. degradation overall linearity increasing number stages investigated, conclusion that reduced by half when doubling stages, if proper design precautions not taken. rules so mechanical parameters thus individual can be optimized to achieve higher whole circuit. In addition, novel concept introduced authors, actuator discrete tuning steps, discussed formulas.
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