An alternative method for gas temperature determination in nitrogen plasmas: Fits of the bands of the first positive system (B Π3g→A Σ3u+)

作者: Costel Biloiu , Xuan Sun , Zane Harvey , Earl Scime

DOI: 10.1063/1.2537448

关键词:

摘要: A method of gas temperature determination in nitrogen or doped discharges is presented. The employs fits numerically generated spectra the 0-0, 1-0, and 2-0 bands first positive system (B Π3g→A Σ3u+) to experimental measurements. Excellent agreement between values inferred by using this 3-0 band peak ratio [M. Simek S. De Benedictis, Plasma Chem. Proc. 15, 451 (1995)] demonstrated for a helicon plasma. spectral model available use plasma spectroscopy community. model, along with user instructions, can be downloaded from Electronic Physics Auxiliary Publication Service American Institute Physics. includes line positions, Honl-London factors, provides rapid if one more aforementioned emission rovibrational are available.

参考文章(56)
Lawrence G. Piper, Karl W. Holtzclaw, B. David Green, William A. M. Blumberg, Experimental determination of the Einstein coefficients for the N2(B–A) transition Journal of Chemical Physics. ,vol. 90, pp. 5337- 5345 ,(1989) , 10.1063/1.456439
Ricky K. Y. Fu, Xiubo Tian, Paul K. Chu, Enhancement of implantation energy using a conducting grid in plasma immersion ion implantation of dielectric/polymeric materials Review of Scientific Instruments. ,vol. 74, pp. 3697- 3700 ,(2003) , 10.1063/1.1588757
H. Geisen, D. Neuschäfer, Ch. Ottinger, State-specific predissociation of N2(B 3Πg) measured by laser-induced fluorescence on a molecular beam Journal of Chemical Physics. ,vol. 92, pp. 104- 115 ,(1990) , 10.1063/1.458479
Eric J. Tonnis, David B. Graves, Neutral gas temperatures measured within a high-density, inductively coupled plasma abatement device Journal of Vacuum Science and Technology. ,vol. 20, pp. 1787- 1795 ,(2002) , 10.1116/1.1503901
Yu. B. Golubovskii, V. M. Telezhko, Measurement of gas temperature from the unresolved rotational structure of the first positive band system of nitrogen Journal of Applied Spectroscopy. ,vol. 39, pp. 999- 1003 ,(1983) , 10.1007/BF00659032
P Supiot, D Blois, S De Benedictis, G Dilecce, M Barj, A Chapput, O Dessaux, P Goudmand, Excitation of N2(B 3Pig) in the nitrogen short-lived afterglow Journal of Physics D. ,vol. 32, pp. 1887- 1893 ,(1999) , 10.1088/0022-3727/32/15/317
Hans‐Joachim Werner, Josef Kalcher, Ernst‐Albrecht Reinsch, Accurate ab initio calculations of radiative transition probabilities between the A 3Σ+u, B 3Πg, W 3Δu, B′ 3Σ−u, and C 3Πu states of N2 Journal of Chemical Physics. ,vol. 81, pp. 2420- 2431 ,(1984) , 10.1063/1.447917
V. Kaeppelin, M. Carrère, J. B. Faure, Different operational regimes in a helicon plasma source Review of Scientific Instruments. ,vol. 72, pp. 4377- 4382 ,(2001) , 10.1063/1.1419228
M. Shimada, R. Cattolica, G. R. Tynan, Electron beam fluorescence temperature measurements of N2 in a semiconductor plasma reactor Journal of Vacuum Science and Technology. ,vol. 22, pp. 371- 376 ,(2004) , 10.1116/1.1644113