Manufacturing method for integrated sensor arrays
作者： Per-Erik Fägerman
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摘要: Method for the fabrication of sensor arrays with individually different sensing surface, where lift off technique and shadow mask is used simultaneously. A resist layer openings at all locations coatings are intended applied technique. Then a provided widows only deposit one specific coating. By instance vapor deposition, effected there in windows mask. The moved to next depositions location procedure repeated until have been effected. removed as also giving an improved quality compared prior-art methods.
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