Capacitive humidity sensing properties of hydrothermally-etched silicon nano-porous pillar array
作者： Yuan Yuan Xu , Xin Jian Li , Jin Tian He , Xing Hu , Hai Yan Wang
DOI: 10.1016/J.SNB.2004.06.004
关键词:
摘要: Hydrothermally-etched silicon nano-porous pillar array (Si-NPPA) was studied as a sensing material to detect humidity. Room temperature capacitance sensitivity of Si-NPPA sensor investigated at relative humidity (RH) ranging from 11 95% under different signal frequencies. As result, the measured showed an increase over 1500% low frequency 100 Hz. The response time about 15 and 5 s in RH-increasing process RH-decreasing process, respectively. These excellent characteristics indicate that might be practical material.
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