Fabrication of micro/nano fluidic channels with sacrificial galvanic coupled metals
作者： Hongjun Zeng , Zhiliang Wan , Alan D Feinerman
DOI: 10.1088/0957-4484/17/13/018
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摘要: We report a new sacrificial method for micro/nano fluidic channel fabrication by galvanic corrosion of coupled metals. Different metal combinations and etchants are investigated achieving high etching rate with very small cross-sections. Channels as well arrays, from 50??m to tens nanometres wide, fabricated using Cr/Cu the layer. The is function time width. metals approximately 10 times faster than that single metal. This advantageous because resolution, relatively throughput, simplicity process.
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