Film forming apparatus having electrically insulated element that introduces power of 20-450MHz
作者： Kazuyoshi Akiyama
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摘要: A deposited film-forming apparatus comprising a reaction chamber capable of being vacuumed in which glow discharge is caused by means high frequency power supplied introduction to form film on substrate positioned said chamber, wherein comprises an insulating material as base constituent and has region isolated from zone electrode electrically conductive metallic having thickness sufficiently transmitting disposed such that it contacted with state no clearance. process using apparatus.
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