Anisotropic ion beam etching of fused silica to mitigate subsurface damage
作者： Bo Li , Xia Xiang , Chengxiang Tian , Chunyuan Hou , Wei Liao
DOI: 10.1142/S0217979220500605
关键词:
摘要: The laser damage resistance of fused silica optics depends significantly on the surface quality. In this work, anisotropic etching with inert ion beams at various incident angles was performed ...
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