作者: Hubertus Hubsch , Heinz Dimigen , Holger Luthje
DOI:
关键词:
摘要: Thin films of boron nitride become more resistant to environmental influences and exhibit a better etching behaviour (a Permalloy etch instead hydrofluoric acid can be used) when titanium (zirconium, hafnium) is provided together with during the provision films, for example, by cathode sputtering. Dependent on content thin constitute, insulators or resistors. The BN/Ti have eminent sliding properties may used, as solid lubricant potentiometers.