Mounting table for wafers

摘要: The invention relates to an improvement for a wafer mounting table particularly use in photolithographic apparatus processing wafers comprising compact block made of glass-ceramics which has two neighboring back supports limiting sides top face said block. is provided with at least three studs supporting be processed. the back-supports facing away from are elongated horizontally extending silvered area each, opposition laser path measuring system each. beams define plane coincides projection lens being mounted on studs. Means substantially eliminating departures areas straight plane. Further means enable quick adaption mount charges having different thicknesses or diameters.