Dual laser high precision interferometer

摘要: An absolute distance measuring device based on laser interferometry may combine coarse, intermediate, and highest resolution measurement techniques to find the a sample surface with high resolution. The provide at least two wavelengths simultaneously, allow reduction or elimination of certain common-mode error components, including dynamic components. scan one over relatively narrow range use quadrature detectors enough signal data self-corrections be performed resulting scanned signals measurements. A novel tunable and/or detector advantages in combination device.