Zn drops at a Si surface measured by the refracted x‐ray fluorescence method
作者： Y. C. Sasaki , M. Kisimoto , S. Nagata , S. Yamaguchi , K. Hirokawa
DOI: 10.1063/1.347411
关键词:
摘要: Si and Zn are essentially mutually insoluble. We were able to detect drops at a surface by using the refracted x‐ray fluorescence method when wafer was implanted with ions 50 keV up doses of 1 × 1016 cm−2. The presence confirmed both measuring roughness Rutherford‐backscattering spectroscopy spectra.
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