Beam re-registration system and method
作者： Thomas D. Lamson , Eugene Mirro , Benyamin Buller
DOI:
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摘要: A beam re-registration system and method for error correction of a particle or other are disclosed. The may include beam, stage movable in relation to the at least two servos controlling movement stage, fixed target grid located on controller adapted control servos. attenuate high frequency signals amplify low signals, be type 2 which accurately corrects ramp disturbance.
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