CFD-micromesh: A fast geometric modeling and mesh generation tool for 3D microsystem simulations

摘要: In this work, a new fully automated geometrical modeling and meshing tool is described. It imports standard layout formats, images, 3D boundary representations s. A model then generated by simulating operations specified the process data or user. finite element mesh with tagged volume conditions automatically created. The automatic generation of takes typically couple minutes on current PC machine. paper will present geometry/meshing engines, user interfaces, demonstrate them range microsystem applications.© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading abstract permitted personal use only.