Laser apparatus having improved via processing rate
作者： David B. Noddin
DOI:
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摘要: A laser via drilling system, and method of operation thereof, operates at an increased pulse repetition rate, but provides output pulses sufficient energy consistent to energy. In order drill a hole in substrate, pulsed beam is formed using lithium triborate (LiB3 O5) crystal for harmonic generation. The has density that greater than ablation threshold the substrate. beam. decreased less first re-positioned site next be formed. back original by increasing rate Likewise, decreasing
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